Impurity detection in nitrous oxide (N2O)

ECO PHYSICS AG | APPLICATION REPORT

Besides being a weak anesthetic gas, for instance in the context of dentistry, Nitrous Oxide (N2O) is also essential for the Semiconductor production process. It is the main Oxygen source for Silicon Oxide in the Chemical Vapor Deposition (CVD) process and is used in the high-tech thin film industries and LCD-display manufacturing. Nitrous Oxide (N2O) also always carries low levels of Nitrogen Monoxide. Therefore, the calibration gas purity is crucial. It needs as little Nitrogen Monoxide (NO) in Nitrous Oxide (N2O) as possible. To check the purity levels of N2O, the nCLD844CMhr “N2O-Edition” is a perfect choice. With adapted gas flow and converter configuration, this model is the first chemiluminescence analyzer, that is able to detect Ammonia impurities in Nitrous Oxide (N2O). ECO PHYSICS- Measurably better!