Ebara Technologies Inc services

Field Service

EBARA’s Components Division onsite field services is widely recognized by OEMs as a leader in vacuum pump maintenance and related equipment services. EBARA’s awarding winning service group consists of factory-trained field service technicians at numerous strategic locations throughout North America. We provide service to non-EBARA products as well as our own. EBARA offers a wide-range of vacuum pump maintenance packages that can be customized to meet your operational requirements. EBARA provides pump maintenance and repair solutions such as manpower, guaranteed up-time, spare and consumable parts management, logistics and data analysis.

Repair & Remanufacturing Services

EBARA has full vacuum pump repair and remanufacturing capabilities for all types of pumps including EBARA and non-EBARA dry, wet, turbomolecular vacuum pumps. We remanufacture the products to the OEM specs. Ebara Technologies, Inc. is an authorized Osaka Vacuum USA repair provider.

Third Party Services

Our award-winning Field Service team, by servicing your sub-fab equipment and utilizing our extensive knowledge base, accomplishes this in the following technology segments: Vacuum Pumps Point of Use Abatement Cabinets Chillers RF Power Supplies Mass Flow Controllers Specialty process kit parts cleaning

ASC2T Components Parts

Ebara Technologies Inc, Components Division, is now the Semiconductor Applications representative for ASC2T, Advanced Semiconductor Cleaning / Coating Technology. The ThermaGas Process is a new cleaning technique that utilizes High Temperatures, Reactive Gases and High Vacuum to remove the contaminated residue from parts used in the manufacture of semiconductors. This process is especially useful on parts made from ceramic or graphite materials. It is much more cost effective and environmentally friendly than traditional methods using media blasting and wet chemical etchants.

Non-EBARA Product Service

For over 20 years EBARA has provided rebuild, repair and return services for our competitors’ dry, wet, turbo and cryo pumps. EBARA’s Field Service Team will perform the exchanges, pack & ship, and manage the logistics associated with ensuring success. We will develop and perform all required preventive maintenance for non-EBARA products at the same manor we do with our own products, becoming the first level of support for all planned and unplanned maintenance. In addition, EBARA’s remanufacturing services benefit from a solid foundation of vacuum pump manufacturing excellence combined with field-proven technologies via our global services network (BKMs).

Semiconductor Engineering Services

EBARA’s semiconductor engineering team is the worldwide leading supplier of Chemical Mechanical Polishing (CMP), Advanced Wafer Plating systems, Bevel and Backside Cleaning Treatment Systems. Learn more about our facilities and semiconductor engineering capabilities below.