TAPI - Model 470 - Dissolved Ozone Analyzer - Specification Sheet

The Model 470 dissolved ozone sensor is designed for semiconductor wet bench tools and many other industrial processes. It provides continuous measurement of dissolved ozone in deionized water or sulfuric baths with concentrations above 150 mg/L. The Model 470 is “clean ready” for high purity semiconductor processes, and is designed to be simply spliced in-line in the recirculation loop of any wet bench tool with flow rates up to 150 SLPM.