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Park - Model XE15 -Atomic Force Microscope
Increase your productivity with our powerfully versatile atomic force microscope. The Park XE15 includes many unique capabilities that make it ideal for shared labs that handle a diverse range of samples, researchers doing multi variant experiments, and failure analysis engineers working on wafers. Its reasonable price and robust feature set also make it one of the best value large-sample AFMs in the industry.
Unique MultiSample™ scan boosts research productivity
Maximize your efficiency with the only AFM that offers the ability to image and measure multiple samples in one pass. Simply load the stage with your samples and initiate the scan process. This feature also allows you to scan the samples under identical environmental conditions, improving the accuracy and reliability of your data.
Large sample size increases possibilities
Unlike most AFMs, the Park XE15 can scan a sample of up to 150 mm x 150 mm. This makes it ideal for researchers wanting to scan larger samples or failure analysis engineers who need to place silicon wafers on the stage.
Features adaptable to any need
The Park XE15 features our most inclusive set of scan modes and can process a range of sample sizes. This makes it uniquely suited to shared labs with a wide range of individual requirements.
The most convenient sample measurements with MultiSample™ scan
- Automated imaging of multiple samples in one pass
- Specially designed multi-sample chuck for the loading of up to 16 individual samples
- Fully motorized XY sample stage travels up to 150 mm x 150 mm
Using the motorized sample stage, MultiSample Scan™ enables programmable multiple region imaging in step-and-scan automation.
Here’s how it works:
- Register multiple scan positions defined by a user
- Image from the first scan position
- Lift a cantilever
- Move the motorized stage to the next user defined coordinate
- Approach
- Repeat scan
The registration of multiple scan positions is easily carried out by either entering sample-stage coordinates or sample de-skewing by two reference points. This automated feature greatly increases productivity by reducing the need for your interaction during the scan process.