Dynavac
Batch PVD System
FromDynavac
High-performance, high-reliability batch PVD systems for thin film deposition. Dynavac designs and builds batch PVD systems for a wide variety of applications. Our systems can deposit metal films such as aluminum, silver, molybdenum, and chromium on glass, metal, plastic, or foils. Additionally, we sputter a wide range of semiconductor materials and dielectrics including transparent conductive oxides. Dynavac optimizes all aspects of the system to ensure that sputtered films are smooth, dense, and adherent. And after nearly 40 years in the business, we’re here to stay with customer service second to none.
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Each Dynavac thin film system is built for superior performance- from small batch and R&D coating systems to large-area systems with flat or multi-dimensional substrates. Our deposition sources and power supplies are selected for optimal film smoothness, density, and adhesion.
Sputtered films
- RF, AC, and DC power
- Planar and rotary magnetron sources
- Reactive processes for oxides, nitrides, etc.
PVD sources
- High current thermal sources
- Electron beam evaporation
Ion sources
- End-Hall ion source
- RF ion source with hollow cathode neutralizer
We’ve been in the thin film business since 1982 and know how to deliver top-notch customer support. Our dedication to customer success starts with the design process, runs through manufacturing, commissioning, and field service. And with the Dynavac Application Lab we can partner with you from the very first steps in designing coating processes and systems.
- Magnetron cathode (DC, pulsed DC and RF)
- High current thermal
- Single and multi-pocket e-beam
- End-hall ion source
- RF ion source with hollow cathode neutralizer
- RF, AC, and DC power
- Planetary and rotary magnetron sources
- Reactive processes for oxides, nitrides, etc.
- Standard cylindrical or rectangular up to 1.8m
- Custom sizes and shapes available
- Load locks
- Material handling
- Roughing systems using oil-sealed or dry mechanical pumps
- Cryogenic, turbomolecular, or diffusion for high vacuum pumping
- Removable evaporation baffle for easy cleaning
- Meissner coil option with liquid nitrogen or closed-cycle cryogenerator
- Single rotation
- Flat calotte
- Segmented fixture
- Domed fixture
- Flipping mechanism
- Planetary mechanism
- Multi-planet, dual rotation
- Custom-engineered tooling
- Loading carts/systems available for large optics
- Front-side quartz heating system
- Back-side Calrod heating system
- Custom solutions >300C
- Glow-discharge cleaning system
- Ion source for substrate cleaning
- Physical: quartz crystal control
- Optical: Spectrum-Pro Optical Monitoring System
- Industrial programmable logic controller for high reliability
- Menu-driven graphical interface via LabVIEW software
- Data logging with user-selected variables
- Download capability from standard thin-film design programs
- Remote diagnostic capability