Ges5e Xprt Equipment & Supplies

1 equipment items found

GES5E - Spectroscopic Ellipsometer

Manufactured by:Semilab Semiconductor Physics Laboratory Co. Ltd. based inBudapest, HUNGARY

Semilab Sopra produces a Spectroscopic Ellipsometer capable to work down to 135 nm (GES5-E with PUV option). The entire spectral range is 135–650 nm. This enables us to measure all the new materials designed for the next generation lithography (157 nm, Fe excimer laser), like photoresist, ARC layers and all the optics included in the next generation Stepper. Based on GES5E platform, the ...

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