SemiProbe - Model LA-100 DC -Lab Assistant Probe System

The SemiProbe Lab Assistant family of probe systems is specifically designed to address the requirements of research personnel - simplicity and ease of operation, portability, affordability and modularity. The Lab Assistant provides features and options that are typically only available in much more expensive systems – multiple stages, chucks, optics and manipulators. Numerous accessories can be added at a later date to enhance the system functionality.

• Small footprint – fits on a desk, small bench, in a glove box or dark box
• Sold as a completely configured system
• Interchangeable components - can be used as a single or multiple application system
• Modular – numerous accessories can be added for additional capability
• DC, HF/Microwave & Kelvin versions available

• Rigid aluminum base with rubber vibration isolation feet
• Coarse and fine wafer stage adjustment with interchangeable stage options - packaged part or thermal
• Fine stage movement using precision micrometer control - X (25 mm), Y (25 mm) & Z (>20 mm)
• Coarse (360 degrees) and fine (10 degrees) theta adjustment
• 100 mm (4”) chuck with isolation adapter and vacuum control system
• Aluminum with stainless steel plated platen with removable front wedge
• Precision micrometer driven platen Z lift (13 mm)
• Two (2) DC MA-8005 manipulators with magnetic bases, face plates and coaxial probe arms (standard)
• Microscope post with coaxial and linear microscope X, Y movement of 100 mm x 100 mm
• 6.7:1 zoom (100x magnification) trinocular stereo zoom microscope with 100 mm working distance