HS-Group GmbH

HS-GroupModel QUATRON-L - Linear Plasma Beam Source

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The QUATRON-L Linear Plasma Beam Source is a modular and adaptable plasma source designed for diverse coating systems. Its linear design allows scalability according to specific substrate dimensions, making it a versatile choice for a range of applications. The beam length is customizable based on substrate size, while the beam width depends on thermal considerations that impact the extraction grid or the source's mounting specifics. This flexibility ensures optimal performance across varying operational environments. Technical specifications are available upon request, reflecting the customizable nature of this source. Whether integrated into new systems or retrofitted into existing configurations, the QUATRON-L is engineered to meet coating system requirements efficiently, offering a reliable option for plasma technology applications.

Most popular related searches
  • Beam length
    • 270 mm (QUATRON-L 270)
    • 600 mm (QUATRON-L 600)
    • 800 mm (QUATRON-L 800)
  • Beam width
    • 140 mm (QUATRON-L 270)
    • 100 mm (QUATRON-L 600)
    • 100 mm (QUATRON-L 800)
  • Beam area, ca. : 2 * 10^3 ... 1 * 10^-5 mbar
  • Gas : all gases
  • RF-Power, max. : 5000 Watt
  • Energy up to : 2000 eV
  • Current density up to : 3,6 mA/cm²
  • Matching : manual, automatic
  • Extraction net : tungsten, stainless steel, etc...
  • Cooling : Water
  • Applications : Roll-to-Roll Coaters, PVD, PECVD, Etching, Cleaning, etc…