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Silver Automation - Low flow gas Mass Flow Controller
The SRK-DL Series low-flow mass flow meter and controller is capable of measuring ultra-low gas flow rates as low as 2 sccm (2 ml/min). This ultra-low flow meter is widely used in applications such as gas chromatography, gas analysis, laboratory research, and industrial processes where precise gas flow measurement is essential. It is suitable for measuring gases including oxygen, nitrogen (N₂), biogas, CO₂, and more in extremely low flow applications.
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Gas Flow Range: 2 SCCM~ 30 SL/M, such as 100 ml/min, 200 sccm,1 LPM, 2 SLM,5 liter /minute,20 SLPM .
Turn Down Ratio: 50:1 for digital mass flow controller; 100:1 for digital mass flow meter;
Accuracy : ± 1% F.S
Linearity : ± 0.5% F.S
Repeatability:± 0.2% F.S
Response Time: mass flow controller < 2s; mass flow meter <0.8s
Communication: RS232/485.MODBUS
Output: 0~5V,4-20mA,1-5V
Power Supply : ±15VDC,24VDC
Operation Temperature: 0~50°C
Max operation pressure: 3MPa/10MPa
Mass flow sensor or flow controller material : Stainless steel
Low flow flow meter process connection: Φ3, Φ6, 1/8”, 1/4”