- Home
- Companies
- Fujikin of America
- Products
- Fujikin - Model FCS-T - Mass Flow ...
Fujikin - Model FCS-T -Mass Flow Controllers
Fujikin’s thermal series Mass Flow Controllers (FCS-T) are designed specifically for semiconductor and solar applications that combines high accuracy, better throughput and reduced system costs.
Exceptional Accuracy
The FCS-Thermal Series MFCs achieve exceptional accuracy, fast response, and excellent repeatability by utilizing digital technology.
High Performance Sensor
Fujikin uses a low temperature flow sensor that enables longer MFC life and prevents sensor clogging when flowing reactive gases such as arsine, phosphine and diborane.
Highly Reliable Diaphragm Valve
Fujikin has incorporated decades of experience in valves in the control valve assembly. It utilizes fast responding solenoid and piezoelectric actuators and dead space-free construction to provide excellent gas displacement characteristics and virtually no particle generation.