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SEMILAB - Model WT-2000 -Multifunction Wafer Mapping Tool
The WT2000 is a tabletop tool, suggested for mid-range fabs and laboratories.
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- Wafer size: up to 300 mm with bare or dielectric coated surface
- Wafer handling: manual or Semilab made indexer
- Loading options:
- 100-200 mm cassette indexer
- 300 mm 13-slot cassette indexer, including open cassettes for 100-300 mm wafers
- 300 mm 25-slot cassette indexer, including FOUP, FOSB, and open cassettes for 100-300 mm wafers
- Objectives of detection:
- Impurities due to heavy metal and transition metal contamination
- Crystal defects
- Optional iron concentration determination both in CZ and FZ wafers
- No wafer thickness limitation
- Fast measurement speed
- High lateral resolution
- Required surface passivation: thermal oxide, chemical passivation or corona charging