OptoSigma - Model FS-1050UPX -Nano-Resolution Stage Systems

50mm Travel X-axis Motor Stage, 1nm resolution, 120X120mm, M4 Thd

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FS-UPX is feedback stage with 1nm resolution positioning.
FS-UPX series operates faster than high torque type FS-SPX series.
In-house optical linear encoder are built-in at the center of stage to detect position.
Positioning to target position, positioning repeatability and holding the position with high resolution is achieved by feedback control using position information of encoder.
There are two types of the stage which travel of 20mm and 50mm.

Name: 50mm Travel X-axis Motor Stage, 1nm resolution, 120X120mm, M4 Thd
Weight: 1.6000kgs
Guide: -
Attention: -
Stage Size: 120×120mm
Travel: 50mm
Stage Size: 120×120mm
Weight: 98N(10kgf)
Minimum Resolution *1: 1nm
Positional Repeatability *1: ±2nm
Running Parallelism: 10μm
Maximum Travel Speed: 5mm/sec*1 Minimum resolution and position repeatability accuracy for built-in scale read.
Primary Material: Aluminum
Finish: Black anodized
Motor Type: ?28mm 5 phase stepping motor
Limit Sensor: Equipped
Origin Sensor: None
Proximity Origin Sensor: None
Signal Cycle: 2μm
Scale Cable*: 2m *Scale cable comes directly out of the stage. Please prepare "extension cable for scale" separately if 2m or longer cable are needed.
Compatible Controller: FC-911
Compatible Cable: PM-CA-*

Product Details