Model Odyssey -Precision Optical Coating Systems
Typical coating uniformity is less than 2-3% (less than .5% achievable in some configurations). Compact system for small-scale production with the high-quality results of larger systems. Two sizes to meet a variety of R&D and pilot production requirements. Supports multiple sputtering and thermal evaporation deposition processes.
- Bandpass filters
- Astronomical filters
- Anti-reflection optics
- Electronics
- Laser optics
A small-scale optical system that produces big results. The Odyssey optical coating system series is a perfect solution for optical PVD thin film coating in R&D, pilot, or small-scale production. Dynavac’s nearly 40 years of thin film experience gives you the high-quality results of a large, sophisticated system in a small footprint. Odyssey’s versatile design supports many types of deposition methods to produce highly efficient, uniform thin film coatings for even the most complex applications.
Deposition sources:
- Single or Multi-pocket electron beam sources
- High current thermal evaporation sources
- Magnetron cathode – DC, pulsed DC and RF
Ion sources:
- End-Hall ion source with hollow-cathode neutralizer
- RF ion source with hollow-cathode neutralizer
Offered in two compact sizes-
- Odyssey450- 450mm W x 450mm D x 600mm H
- Odyssey600- 600mm W x 600mm D x 700mm H
Full opening front door with viewport
Complete system housed in modular cabinet
Available options – water cooling & additional ports for customer use
High Vacuum Pumping
- 8” Cryopump and compressor
- Optional turbopump configuration
Rough Vacuum Pumping
- 14.6 CFM Rotary vane pump
- Optional dry pump
The Odyssey platform offers a variety of fixtures for substrate handling.
- Planetary mechanism
- Flat calotte
- Segmented fixture
- Domed fixture
- Flipping mechanism
Substrate heating system
- Front-side quartz heating system
- Back-side Calrod heating system
- Custom solutions available for heating beyond 300oC
Glow-discharge cleaning system
Ion Source for substrate cleaning
The Odyssey system offers state-of-the-art layer thickness control to ensure process flexibility, precision and reliability run after run. The following are available:
- Physical: Quartz Crystal Control
- Optical: Spectrum-Pro Optical Monitoring System
The Odyssey product line includes a Dynavac-designed control system that can be customized for your unique requirements.
Features
- Industrial programmable logic controller for high reliability
- Menu-driven graphical interface via LabVIEW software
- Data logging with user-selected variables
- Download capability from standard thin film design programs
- Remote diagnostic capability