SEMILAB - Model ACV- 2200, ACV-3000, ACV-3100 -Resistivity Measurement Unit

ACV systems provide 100% non-contact, non-destructive measurements of epi layer resistivity via patented technology.  The physics behind the measurement is quite similar to C-V Schottky or Hg-probe, and thus the output is a traditional C-V doping profile. The difference is that the electrode does not touch the wafer, resulting in substantial cost savings of monitor wafers. The model includes complete automation, powerful software, and excellent measurement repeatability.