FHR - Model FHR.Roll Series -Sputtering, Evapor­ation & PECVD Systems

Mod­ern elec­tron­ics are flex­ible. Our roll-to-roll vacuum coat­ing sys­tems with PVD and PECVD tech­no­logy are the ideal sys­tem concept for pro­duc­tion of products such as flex­ible solar cells, organic dis­play films or flex­ible sensors. Metal and plastic films are used as sub­strate mater­i­als, the coat­ing width is set indi­vidu­ally. This design concept offers the highest level of flex­ib­il­ity in the field of sput­ter­ing and evap­or­a­tion pro­cesses. A freely pro­gram­mable web wind­ing sys­tem and the abil­ity to reg­u­late the tem­per­at­ure of the sub­strate allow vari­ous sub­strate mater­i­als and film thick­nesses to be pro­cessed in a wide pro­cess win­dow. We have the ex­per­tise needed to integ­rate in-situ pro­cess mon­it­or­ing and derived online pro­cess con­trol. 

The fol­low­ing tech­no­lo­gies can be imple­men­ted into our inline sys­tems in accord­ance to the spe­cific require­ments of the cus­tom­ers` applic­a­tions.

• Magnetron sputtering   
• Thermal evaporation    
• Plasma Enhanced Chemical Vapour Deposition (PECVD)   
• Ion Etching (IE)

The FHR.Roll product series provide our cus­tom­ers with high-qual­ity coat­ing machines that com­bine a wide vari­ety of char­ac­ter­ist­ics and advant­ages. 

• Proven, reliable system concept   
• Equally suitable for research and production   
• Extremely flexible system control thanks to FHR`s proprietary software programs   
• Without front-side contact (AVOtouch technology) if needed   
• Attractive investment and operating costs   
• Excellent target yield   
• Quick and easy target replacement