Brumley South, INC
BSI - Model KLA Tencor Surfscan 6400 -Surface Inspection System
Bare Wafer Surface Defect Inspection System. The Surfscan 6400 is a highly advanced inspection system designed specifically for detecting defects on bare wafer surfaces. System can handle up to 200mm capable. Cassette Handling: Single puck handling from single cassette or platform. Substrate Thickness: Automatic adjustment within 2 mm range. Material: Any surface that scatters less than 90% of incident light
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Defect Sensitivity
- - Most Surfaces: Better than 0.20 um (depending upon surface quality)
- - Polished Silicon: Better than 0.15 um at 95% capture rate
Repeatability Error:
Count repeatability error less than 1.5% at 1 standard deviation (Mean count greater than 500 for 0.364-um diameter latex spheres on bare silicon)
- Count Accuracy: Better than 99% as verified with VLSI Standards
- Relative Standard Spatial Resolution: 50 um spacing, minimum
- Dynamic Range: 0.1 um to 100 um in a single measurement
- - Up to 120 wafers per hour using 150 mm wafers
- - Up to 95 wafers per hour using 200 mm wafers
- Contamination: Less than 0.5 particles/cm squared greater than 0.20 um diameter per single pass