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Patacon Leaf Area Software
2 software items found
by:NIPPON CONTROL SYSTEM Corporation based inShibuya-ku, JAPAN
PATACON PC-Cluster For EPL is a software product running on multiple Linux PC's for converting semiconductor mask design data to manufacturing data for EB steppers.This software has specialized functions for EPL, such as pattern placement for EPL mask structure, complementary division for stencil masks, stitching for connecting divided portions, proximity effect correction, generation of machine ...
by:NIPPON CONTROL SYSTEM Corporation based inShibuya-ku, JAPAN
PATACON PC-cluster For LEEPL is a software product for converting semiconductor mask design data to manufacturing data for LEEPL stepper.Since LEEPL mask has different structure from that of photo mask, this software has specialized functions showed below to deal with data conversion for ...
