Global Warming Product Applications For The Electronics And Computers Industry

1 applications found

Waste gas treatment for the TFT industry

Manufacturing TFT/LCD displays requires waste gas treatment as well. Processes that produce large scale Thinfilm Transistors (TFT) on glass substrates, for instance, use Chemical Vapour Deposition – CVD – to separate the thin films onto the material. The process requires cleaning the process chamber periodically and usually employs etching with NF3. Etching of the separated thin films typically utilises CF4, SF6 and chlorinated gases, which release large amounts of waste gas ...

ByDAS Environmental Expert GmbH based in Dresden, GERMANY

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