Residual Gas Analysis - semiconductor industry

Residual Gas Analysis is a general term for the analysis of gas and vapour species in vacuum chambers and vacuum processes. The Hiden RGA series quadrupole mass spectrometers provide for routine, fast, wide dynamic range residual gas analysis, measuring the partial pressures of the species that are critical to vacuum quality and process requirements. Applications include: vacuum chamber leak detection vacuum quality measurement and monitoring virtual leak detection outgassing studies bakeout cycle/vacuum pump down monitoring