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Residual Gas Analysis Product Applications
3 applications found
Residual Gas Analysis is a general term for the analysis of gas and vapour species in vacuum chambers and vacuum processes. The Hiden RGA series quadrupole mass spectrometers provide for routine, fast, wide dynamic range residual gas analysis, measuring the partial pressures of the species that are critical to vacuum quality and process requirements. ...
ByHiden Analytical Ltd. based in Warrington, UNITED KINGDOM
Hiden Ion Milling Probe – End Point Detector The only dedicated end point determination tool for ion etch control and optimum process quality. End point Analysis. Target Impurity Determination. Quality Control / SPC. Residual Gas Analysis. Leak Detection The IMP is a differentially pumped, ruggedized secondary ion mass spectrometer for the analysis of secondary ions and neutrals from the ion mill process, ...
ByHiden Analytical Ltd. based in Warrington, UNITED KINGDOM
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This includes the gases used in atomic layer deposition as well as high levels of accuracy for residual gas ...
ByEnvironics, Inc. based in Tolland, CONNECTICUT (USA)