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Fast Profiler Articles & Analysis

1 articles found

Combining plasma profiling TOFMS with TOF-SIMS depth profiling for microelectronic applications

Combining plasma profiling TOFMS with TOF-SIMS depth profiling for microelectronic applications

Read our recent article showing the comparison of TOF-SIMS and Plasma Profiling TOFMS (PP-TOFMS) depth profiles of SiGe, metal silicides, photovoltaics complex metal/oxide stacks, and PZT, published in Journal of Vacuum Science & Technology B. And discover the unique capabilities of PP-TOFMS as a fast depth profiling tool ...

ByHORIBA Europe GmbH

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