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Semilab - Model DLS-1100 -Deep Level Transient Spectroscopy
The DLS-1100 is a high-end DLTS system designed for semiconductor R&D and production environments. Featuring an external cryostat for precise temperature control, it offers top-tier sensitivity, full automation, and advanced customization — ideal for production labs, foundries, and high-throughput research facilities.
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- Electrically active defect and contamination identification
- Full range of DLTS measurement modes, including:
- Temperature and frequency scans
- Depth profiling
- Capture cross section determination
- MOS interface state density measurements
- I-V and C-V sample quality tests
- Current DLTS (I-DLS) option for highly conductive samples during temperature sweeps
- Option: TAS (Thermal Admittance Spectroscopy)
- Industry-leading sensitivity with improved signal-to-noise ratio
- Precise thermal control with multi-sensor temperature monitoring
- Trusted tool widely used in semiconductor production facilities across Europe and Asia
- Measurement Sensitivity:
Detects trace contaminants down to 5 × 107 atoms/cm³, among the highest sensitivity levels in the industry
- Operation:
- Destructive technique, requiring Schottky and ohmic contact sample preparation
- Full automation with batch sample support (config-dependent)
- Macro-based measurement scripting
- Integrated cryogenic temperature control with multiple sensor inputs (accuracy better than 1 K)
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- User Interface:
- Graphical UI designed for ease of use by trained operators
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- Graphical UI designed for ease of use by trained operators
- Cryostat:
- Up to 6 probes,
- LN2 or close cycle He,
- Widest temp.range: 30K-800K
- Automated temp. control on selected cryostats
- Bias and pulse voltage range: 20 V or ±50 V
- HF Signal: 1MHz @ 20mV, 100mV, 500mV
- Sample capacitance: <5000pF
- Trap sensitivity:
- Cryostat selection:
- Bath type LN2 80-450K
- Automatic LN2 80-800K
- Tabletop closed cycle He 30-450K
- Low vibration closed cycle He 30-450K (800K)
- Cryostat:
- Up to 6 probes,
- LN2 or close cycle He,
- Widest temp.range: 30K-800K
- Automated temp. control onselected cryostats