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PI (Physik Instrumente) L.P.
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  5. PIHera - Model P-620.1 • P-629.1 - ...

PIHera - Model P-620.1 • P-629.1 -Linear Precision Positioner

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Variable Travel Ranges and Axis Configuration: Travel ranges 50 to 1800 µm; Resolution to 0.1 nm; Linearity error 0.02 %; X, XY, Z versions; XYZ combination possible

Most popular related searches
shock and vibration
capacitive sensor
interferometer
microscopy
semiconductor testing
biotechnology technology

Application fields

  • Interferometry
  • Microscopy
  • Nanopositioning
  • Biotechnology
  • Test applications
  • Semiconductor technology
  • Photonics
  • Fiber positioning

Outstanding lifetime due to PICMA® piezo actuators

The PICMA® piezo actuators are all-ceramic insulated. This protects them against humidity and failure resulting from an increase in leakage current. PICMA® actuators offer an up to ten times longer lifetime than conventional polymer-insulated actuators. 100 billion cycles without a single failure are proven.

Subnanometer resolution with capacitive sensors

Capacitive sensors measure with subnanometer resolution without contacting. They guarantee excellent linearity of motion, long-term stability, and a bandwidth in the kHz range.

High guiding accuracy due to zero-play flexure guides

Flexure guides are free of maintenance, friction, and wear, and do not require lubrication. Their stiffness allows high load capacity and they are insensitive to shock and vibration. They work in a wide temperature range.

Maximum accuracy due to direct position measuring

Motion is measured directly at the motion platform without any influence from the drive or guide elements. This allows optimal repeatability, outstanding stability, and stiff, fast-responding control.