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Micromanipulator for Electron Microscopy
Over the last few years, the MM3A-EM micromanipulator has created an unparalleled new dimension of quality in the field of Electron Microscopy. It is employed in a wide spectrum of SEM, FIB and other microscopes for an even wider range of applications and it has become the industry standard for OEM and retrofit solutions with well over 2000 units in the field. Give your microscope a hand: use the MM3A-EM to add new capabilities and functionality to your instrument.
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Compact and flexible
- Small and practical
- Plug-and-play system with modular components
- Interfacing solutions for most microscopes
- Fast setup and removal
- Effortless work with multiple manipulators
- Useful plug-in tools
Clear and simple
- Result-oriented operation and increased throughput
- Intuitive control interfaces and software
- User-friendly and easy to learn
- Quick and easy tool exchange
- Compact, stand-alone electronics with PC interface
- Pioneering cabling technology
Robust and stable
- Compact construction delivers higher resonance frequencies
- Excellent stability
- Low drift (1 nm/min)
- Reliable operation (one year endurance test)
- Virtually insusceptible to vibrations
- Fast pre-positioning by hand
Fast and precise
- No backlash or reversal play
- Sub-nanometer resolution (0.25 nm)
- Extensive working range (100 cm³)
- No "blind axis" like with cartesian systems
- Integrated coarse and fine displacement in one drive
- High operating velocity (up to 10 mm/sec)
- Length: 62.1 mm
- Width: 20.4 mm
- Height: 25.4 mm
- Weight: 45 g
- Operating range A & B: 240°
Operating range C: 12 mm - Speed A & B: up to 10 mm/s
Speed C: up to 2 mm/s - Resolution A: 7 x 10–9 rad (0.5 nm)
Resolution B: 7 x 10–9 rad (0.2 nm)
Resolution C: < 0.05 nm - Holding force: 1 N
- Holding torque: 3 to 4 Nmm
- Lift B: 5 g
- Probing current range: 10 nA to 100 mA
- Maximum probing voltage: 100 V
- Probing signal resistance: 7.0 ?
- Temperature range: 273 K to 353 K
UHV version: 273 K to 393 K
Low temp. version: 77 K to 393 K - Lowest pressure: 10–7 mbar
UHV version: 2 x 10–10 mbar - Mounting: M4 tapped hole
A = left / right B = up / down C = in / out
All technical specifications are approximate. Due to continuous development, we reserve the right to change specifications without notice.
