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Semiconductor Product Applications In Michigan
21 applications found
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NOx detection is an innovative approach in CMP (Chemical Mechanical Polishing) process control. CMP smoothens the wafer surface with a combined chemical and mechanical polishing procedure. During production, wafers are coated by a thin layer. To avoid damage to the wafer surface, for instance by stress cracks, the NOx emitted as soon as the wafer is plane and blank must be measured. Therefore, a high-resolution NOx-detector, capable of determining exactly when the polishing process must be stopped, is essential. ...
ByECO Physics AG based in Duernten, SWITZERLAND
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Semiconductor fabrication processes (wafer processing, etc.). Successful semiconductor processing depends on the quality of the silicon wafer. ...
ByLAND® based in Dronfield, UNITED KINGDOM
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Ultra low pressure drop MFC's improve efficiency. The UHP gas used in many semiconductor processes is expensive, and tool makers want to extract as much work out of this gas as ...
BySierra Instruments, Inc. based in Monterey, CALIFORNIA (USA)
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Mass flow meters and controllers are used to control the environment in many tools, from controlling the air cushion in photolithography tools to purge gases in PVD ...
BySierra Instruments, Inc. based in Monterey, CALIFORNIA (USA)
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Very small gas flows are controlled in semiconductor chip manufactures in a process called doping. Ultra-low flow mass flow controllers are ideal for these challenging ...
BySierra Instruments, Inc. based in Monterey, CALIFORNIA (USA)
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We manufacture a wide variety of solutions for high pressure gases, corrosive gases, very low flows, high flows and even multiple gases with one flow controller. We customize our instruments to meet specific application fit and budget requirements. Most of the time, we customize for ...
BySierra Instruments, Inc. based in Monterey, CALIFORNIA (USA)
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Many types of analytical and semiconductor tools use a carrier gas as a way to transfer materials between components. ...
BySierra Instruments, Inc. based in Monterey, CALIFORNIA (USA)
Hiden plasma probes measure some of the key plasma parameters and provide detailed information relating to plasma reaction chemistry. Plasma diagnostics for applications in etching, deposition, coating and surface modification. ECR – Electron Cyclotron Resonance plasma Magnetron sputtering High power impulse magnetron sputtering, HIPIMS ICP inductively coupled plasma, and RF plasma Dielectric-barrier discharge ...
ByHiden Analytical Ltd. based in Warrington, UNITED KINGDOM
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Sierra's mass flow controllers are extensively used in the early stages of wafer processing, from controlling the environment in the crystal ingot ovens to measuring and controlling purge or carrier ...
BySierra Instruments, Inc. based in Monterey, CALIFORNIA (USA)
SIMS - for depth profiling, surface composition measurement, and elemental imaging, Hiden's SIMS Workstation provides a complete analytical facility. RGA - The Hiden quadrupole mass spectrometers provide high sensitivity detection capability for the most demanding XHV/UHV vacuum environments. The pulse ion counting detector enables measurement of both positive and negative ions through 7 continuous decades, the integral accumulation mode being used for the capture of discreet particle events. UHV Temperature ...
ByHiden Analytical Ltd. based in Warrington, UNITED KINGDOM
Gas analysers provide for: Bottled gas quality assurance Diving gas monitoring Medical gas Semiconductor gas ...
ByHiden Analytical Ltd. based in Warrington, UNITED KINGDOM
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Due to the advanced, ultra-stable no-drift CMOS (Complementary Metal Oxide Semiconductor) sensor, Sierra is offering a Lifetime No-Drift Sensor ...
BySierra Instruments, Inc. based in Monterey, CALIFORNIA (USA)
XBS Triple Filter Quadrupoles configured for multiple source monitoring in MBE deposition applications. The custom configured ioniser provides for high stability, high senstivity monitoring of oxides and metals from both k-cell and e-gun sources. MBE monitoring and control. Molecular Beam Studies. Multiple beam source analysis. High Performance RGA. Desorption / Outgassing studies / Bakeout cycles. Chamber / Process gas Contaminants. Hiden XBS mass spectrometers for high precision scientific, ...
ByHiden Analytical Ltd. based in Warrington, UNITED KINGDOM
Residual Gas Analysis is a general term for the analysis of gas and vapour species in vacuum chambers and vacuum processes. The Hiden RGA series quadrupole mass spectrometers provide for routine, fast, wide dynamic range residual gas analysis, measuring the partial pressures of the species that are critical to vacuum quality and process requirements. Applications include: vacuum chamber leak detection vacuum quality measurement and monitoring virtual leak detection outgassing studies bakeout ...
ByHiden Analytical Ltd. based in Warrington, UNITED KINGDOM
In the semiconductor manufacturing industry, various perfluorinated compounds (PFCs) are used. ...
ByGasmet Technologies - a Nederman company based in Vantaa, FINLAND
Hiden Ion Milling Probe – End Point Detector The only dedicated end point determination tool for ion etch control and optimum process quality. End point Analysis. Target Impurity Determination. Quality Control / SPC. Residual Gas Analysis. Leak Detection The IMP is a differentially pumped, ruggedized secondary ion mass spectrometer for the analysis of secondary ions and neutrals from the ion mill process, featuring: High Sensitivity SIMS / MS with Pulse Ion Counting Detector. Triple ...
ByHiden Analytical Ltd. based in Warrington, UNITED KINGDOM
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Measure your flow energy with great precision. Control valuable process gases as well as measure plant utilities like water, compressed air, steam and natural gas. Optimize your facility's flow energy with precision measurement and control solutions. ...
BySierra Instruments, Inc. based in Monterey, CALIFORNIA (USA)
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Accurate liquid flow sensor measurement can reduce water bills, determine leakage rates, and increase system efficiency. Solve accurate water and industrial liquid flow measurement requirements with clamp-on or insertion ultrasonic flow liquid flow meters featuring precision sensing elements or our complete line of multivariable mass vortex ...
BySierra Instruments, Inc. based in Monterey, CALIFORNIA (USA)
Incredible advances in micro-miniaturization of electronic components, integrated circuits and microprocessors have benefited our world and will continue to produce new solutions and conveniences. These advances have resulted in extraordinary innovations, such as very powerful, compact computers, cell phones and various telecommunications devices. And these devices, though inconceivable just a few decades ago, are now common place ...
ByAdvanced Micro Instruments, Inc. (AMI) based in Costa Mesa, CALIFORNIA (USA)
Add high performance SIMS capability to your existing FIB system. Hiden Analytical offers high-performance bolt-on secondary ion mass spectrometry (SIMS) for existing focused ion beam (FIB) systems, providing outstanding surface specificity and a naturally high dynamic range for advanced nanoscale material analysis. Our FIB-SIMS systems are poised to enhance your operations, from routine detection tasks to complex sample ...
ByHiden Analytical Ltd. based in Warrington, UNITED KINGDOM